Accomplishing the development of square four point probe instrument with the function of image manipulation for testing sheet resistance automatically 4完成具有圖像識別功能的全自動四探針微區(qū)電阻率測試儀的研制。
In this paper , the circuit used for testing sheet resistance is designed using single chip processor . additionally , we have expressed van der pauw function as a polynomial form through local and global reversal development by using the normalized polynomial match , being convenient not only for programming , but also for sheet resistance testing when using van der pauw and rymaszewski methods 本文還利用單片機系統(tǒng)設(shè)計了薄層電阻測試電路,對于程序中用到的范德堡隱函數(shù),利用非線性反演和規(guī)范化擬合的方法推導出其多項式顯函數(shù)形式。這不僅給對我們編寫程序提供了方便,也為使用范德堡法和rymaszewski法測量薄層電阻提供了便利。
At present , the problem in testing sheet resistance for micro - areas is that probes must be set up at the suitable locations by handwork . in order to know the wafer ' s impurity distributing , we need test many times , so will waste a lot of time . if the wafer ' s diameter would be 300mm , this problem will be more serious . in this paper , image analysis is introduced , through pre - processing and edge picking - up , the probe tips are recognized . then probe tips will be aligned respectively in two perpendicular directions through driving stepper motors . thus the distribution of sheet resistance for whole wafer is got by automatic testing and it offers information for detecting the impurity distribution and the diffusion uniformity 這樣,完成200mm ( 8時)圓片雜質(zhì)的擴散分布需要對許多圖形進行測試,需要花費很長的時間,當測試300mm硅片時問題就更為突出。本文將圖象與視覺測量系統(tǒng)引入四探針測試系統(tǒng)中,對采集到的原始探針圖像進行預(yù)處理、邊緣提取等操作,以便實現(xiàn)探針針尖的識別,然后由電機控制實現(xiàn)探針的自動定位。這樣測試系統(tǒng)可以自動獲得全片的薄層電阻分布,為超大規(guī)模集成電路檢測雜質(zhì)分布和擴散的均勻性提供信息。
test: n. 【動物;動物學】(軟體類的)介殼,甲殼;【植物;植 ...sheet: n. 【航海】 1.繚繩;帆腳索。 2.〔pl.〕(船頭 ...testing record sheet: 試驗記錄表; 試驗記錄卡double loop-sheet testing machine: 雙卷層薄板試驗機sheet metal ductility testing instrument: 金屬板延性試驗儀testing: 測試系統(tǒng); 吃力的; 復(fù)合地層試井; 檢驗的; 施測; 試驗的; 試驗方法; 試驗設(shè)備a sheet of: 成幅的薄片; 一張on the sheet: 在紙上sheet: n. 1.〔常 pl.〕被單;褥單。 2.裹尸布。 3.(懺悔者穿的)白衣;懺悔服。 4.一張(紙);紙張;(尤指黃色)報紙;〔pl.〕書頁;印刷品。 5.表格;圖表;單子;票箋;文件;罪犯的記錄單。 6.(一)片;(一)塊;(一)層;薄片;薄板。 7.(烤面包的)鐵板。 8.(水、雪、冰、火、顏色等的)廣大的面;一片(汪洋、原野等)。 9.〔詩〕帆。 10.郵票的印張〔美國每一印張有郵票400枚〕。 11.【地質(zhì)學;地理學】巖席;巖床;【航空】渦面; 【數(shù)學】葉。 a bed sheet 床單。 a fly sheet 傳單。 an operation sheet 使用說明書;施工說明書;工藝規(guī)范。 a work sheet 工作單。 a log sheet 紀錄表。 a sheet of fire 一片火海。 sheets of rain 傾盆大雨。 a blank sheet 1. 一張白紙。 2. 純潔的心靈。 a clean sheet 1. 清白的歷史。 2. 歷史清白的人;品行善良的人。 as white as a sheet (臉色)刷白。 (get) between the sheets 就寢;(睡)在床上。 in sheets 1. 成薄板[薄片]。 2. 【裝訂】散頁;印好放著不加裝訂。 3. (大雨)傾盆;(大霧)蒙蒙。 pale as a sheet (臉色)蒼白。 put on a white sheet 穿上白色懺悔服,懺悔;悔改。 sheets hot from the press 剛印好的印刷品。 stand in a white sheet =put on a white sheet. vt. 1.給…蓋被單;在…上鋪被單。 2.(用裹尸布)包(死尸);覆蓋。 3.把(鐵板等)延展成薄片;鋪開;展開;伸開;擴展;使成一大片。 The lake was sheeted with ice. 湖面結(jié)一層冰。 vi. 大片地落下;成片地鋪開;大片地流動。 n. 【航海】 1.繚繩;帆腳索。 2.〔pl.〕(船頭或船尾的)空位。 be [have] a sheet [three sheets] in the wind('s eye) 〔俚語〕有點醉[大醉]。 with flowing sheets (橫風時)放松帆腳索。 vt. 用帆腳索扣緊(帆)。 sheet home 用帆腳索扣住(風帆)。 sheet-in: 縮帖laminating sheet to sheet: 單張紙覆膜sheet erosion (sheet wash): 片蝕sheet lead starting sheet: 鉛板始極片sheet piler; sheet stackers: 垛板機sheet to sheet duplicator: 頁轉(zhuǎn)頁復(fù)制機sheet wash (sheet erosion): 片蝕a testing program: 一種試驗方法ability testing: 能力測試accelerated testing: 加速實驗; 加速試驗acceptance testing: 接收測試; 接受測試; 可接受性測試 一般由用戶/客戶進行的確認是否可以接受一個產(chǎn)品的驗證性測試。; 驗收測試; 驗收試驗accuracy testing: 準確性試驗active testing: 動態(tài)測試adaptive testing: 適應(yīng)性測試; 自適應(yīng)測試additional testing: 附加試驗adhesion testing: 密著試驗